Specimens of low alloy steel were carbonitrided under different conditions to attain varying levels of carbon and nitrogen contents. The residual stress depth distribution was evaluated in martensite and retained austenite by X-ray diffraction. Beside standard evaluations, triaxial residual stress states with σ≠0 in both phases were also considered. High values of residual stresses in both phases were observed. The sign, magnitude and location of maximum compressive residual stresses were greatly influenced by the level of carbon and nitrogen contents