A Bellows-Shape Electrostatic Microactuator

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dc.creatorWilliford, Clint W.
dc.creatorLi, Z.
dc.creatorWang, Z.
dc.creatorBricka, Mark R.
dc.creatorBahemuka, T. E.
dc.creatorMubofu, Egid B.
dc.creatorMinami, Kazuyuki
dc.creatorMorishita, H.
dc.creatorEsashi, Masayoshi
dc.date2016-06-15T20:55:19Z
dc.date2016-06-15T20:55:19Z
dc.date1999-02
dc.date.accessioned2018-03-27T08:54:27Z
dc.date.available2018-03-27T08:54:27Z
dc.identifierhttp://hdl.handle.net/20.500.11810/2498
dc.identifier.urihttp://hdl.handle.net/20.500.11810/2498
dc.languageen
dc.titleA Bellows-Shape Electrostatic Microactuator
dc.typeJournal Article

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