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: Optical properties of obliquely deposited TiO2/Ag/TiO2 multilayered films prepared by thermal evaporation and sputtering
methods were investigated for energy efficiency of architectural and automobile windows. Investigation on the influency of layer
thickness on the properties of TiO2/Ag/TiO2 films yield an optimum layer thickness of 5 nm/14 nm/5 nm and 10 nm/14 nm/10 nm for
optimal solar control performance of TiO2/Ag/TiO2 films deposited by sputtering and thermal evaporation methods. The optimum
films were then obliquely deposited with deposition angle varying from 0º
to 70º
for the purpose of optimizing angular selectivity of the
films. The spectral transmittances were measured by HITACHI model U-2000 double beam UV-VIS-Spectrophotometer. The
optimum thickness provided a peak transmittance of 70% at a wavelength of 400 nm for near normal thermally evaporated thin films,
and 72% for films deposited by sputtering unit at ~ 320 °
C for TiO2 layers. Influence of deposition angle for obliquely deposited thin
films was investigated for both sputtered and thermal evaporated thin films. The transmittance values for the films deposited by both
methods gradually increased with increasing deposition angles to a peak of 80% at 400 nm wavelength. The angular transmittance
measurements were taken for the optimum films with 10 nm/14 nm/10 nm thicknesses due to relatively larger overall film thickness as
compared to 5 nm/14 nm/5 nm. Films deposited at 30º
, 40º
and 60º
, with incident light angle of ± 10º
, ± 30º
, ± 50º
and ± 70º
were used for
transmittance measurements. Best angular performance of 7% was realized at ± 10º
light incidence angle for films prepared at 60º
deposition angle.