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A Bellows-Shape Electrostatic Microactuator
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A Bellows-Shape Electrostatic Microactuator
Williford, Clint W.; Li, Z.; Wang, Z.; Bricka, Mark R.; Bahemuka, T. E.; Mubofu, Egid B.; Minami, Kazuyuki; Morishita, H.; Esashi, Masayoshi
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http://hdl.handle.net/20.500.11810/2498
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