| dc.creator | Williford, Clint W. | |
| dc.creator | Li, Z. | |
| dc.creator | Wang, Z. | |
| dc.creator | Bricka, Mark R. | |
| dc.creator | Bahemuka, T. E. | |
| dc.creator | Mubofu, Egid B. | |
| dc.creator | Minami, Kazuyuki | |
| dc.creator | Morishita, H. | |
| dc.creator | Esashi, Masayoshi | |
| dc.date | 2016-06-15T20:55:19Z | |
| dc.date | 2016-06-15T20:55:19Z | |
| dc.date | 1999-02 | |
| dc.date.accessioned | 2018-03-27T08:54:27Z | |
| dc.date.available | 2018-03-27T08:54:27Z | |
| dc.identifier | http://hdl.handle.net/20.500.11810/2498 | |
| dc.identifier.uri | http://hdl.handle.net/20.500.11810/2498 | |
| dc.language | en | |
| dc.title | A Bellows-Shape Electrostatic Microactuator | |
| dc.type | Journal Article |
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